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搜索结果: 1-15 共查到magnetron sputtering相关记录16条 . 查询时间(0.062 秒)
The results of the investigation of morphogenesis and productivity characteristics of Cucumis sativus parthenocarpic hybrids Marinda and Kurazh in ontogenesis in greenhouses under the thermic films ar...
采用直流电源,以纯铝为靶,氧气为反应气体,高纯氩气为溅射气体磁控溅射在PET基底上制备高阻隔性AlxOy/PET包装薄膜,并研究不同氩氢体积比对AlxOy薄膜形貌、成分、结构的影响,讨论了镀AlxOy膜后DET力学性能与阻隔性能的变化。FTIR与XPS研究分析表明,反应氧气量直接影响AlxOy薄膜的化学结构,薄膜的红外光谱的峰值、强度和带宽等变化规律均与氧气量有关,并且AlxOy中氧原子的含量...
Homogeneous freestanding films have been obtained by the direct current (DC) magnetron sputtering technique using a sacrificial layer. After annealing, the films are crystallized with a strong out-of-...
The deposition of Diamond-like carbon (DLC) films brings excellent mechanical, chemical, optical and electronic properties to a large range of materials. However, a problem to be overcome is its poor...
ZnO thin films doped with aluminum (AZO) were deposited on silicon dioxide covered type texturized Si substrates by radio frequency magnetron sputtering, to fabricate AZO/SiO2/p-Si heterojunction, a...
This work is focused on structural and optical properties of TiO2 thin films doped with different amount of terbium. The thin films have been prepared by high energy reactive magnetron sputtering (HE ...
In this paper, the results of investigation of the influence of cathode current on optical and dielectric AlNx thin-film properties are presented. AlNx films were prepared by pulsed DC reactive magnet...
A stable superhydrophobic copper surface was obtained by radio-frequency magnetic sputtering on Si (100) and quartz substrates. The water contact angle and sliding angle of the superhydrophobic copp...
Purpose: Investigation the effect of varying r.f. power and oxygen flow rates during deposition on the electrical properties of copper oxide thin films prepared by reactive magnetron sputtering Design...
期刊信息 篇名 Studies of the composition, tribology, and wetting behavior of silicon nitride films formed by pulsed reactive closed-field unbalanced magnetron sputtering 语种 英文 撰写或编译 作者 Zh.Q. Yao,P. Yang,N. ...
期刊信息 篇名 Characteristics of Y1-xCaxBa2Cu3O7-d Thin Films Grown by DC Magnetron Sputtering 语种 英文 撰写或编译 作者 Z. Wang,Y. Z. Zhang,X. F. Lu,H. Gao,S. L. Jia,H. Chen,H. H. Wen 第一作者单位 刊物名称 International Journa...
This work presents the results of optical emission from Eu3+, Tb3+ and Nd3+ luminescence centers in TiO2 thin films. Thin films were prepared by magnetron sputtering from metallic Ti-Eu, Ti-Tb, Ti-Nd ...
We investigate the effect of the hydrogen intentional incorporation on the structural properties of the amorphous gallium arsenide prepared by rf-magnetron sputtering technique. The properties of the ...
In this work, the influence of the substrate bias on the crystalline structure and surface composition of Ti6Al4V thin films prepared by rf magnetron sputtering were studied. Samples were grown onto t...
Mo thin films have been deposited using a DC magnetron sputtering system with an S-gun configuration electrode and characterized electrically and morphologically. The influence of the sputtering gas p...

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