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The Temperature Dependence of Dark Conductivity in Hydrogenated Amorphous SiNx Films
A. Dark Conductivity B. Activation energy C. Pre-exponential factor D. Hydrogenated amorphous silicon nitride
2010/4/15
Thin film samples of hydrogenated amorphous silicon nitride with varying nitrogen content were prepared by conventional plasma deposition from a mixture of SiH4 and NH3 . The dark conductivity (sd) of...