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Fabrication and characterization of high quality factor silicon nitride nanobeam cavities
Fabrication characterization quality factor silicon nitride nanobeam cavities
2010/11/9
Si3N4 is an excellent material for applications of nanophotonics at visible wavelengths due to its wide bandgap and moderately large refractive index (n $\approx$ 2.0). We present the fabrication and ...