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Acid Gas, Acid Aerosol and Chlorine Emissions from Trichlorosilane Burning Processes
Trichlorosilane Burning process Acid gas, Acid aerosol Chlorine
2016/3/28
This study was set out to investigate the emission characteristics of HCl (in both particle (HClp) and gaseous (HClg)
forms), and Cl2 during the trichlorosilane (TCS) burning process under various re...