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Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics
mid-IR-laser-light scattering non-destructive inspection microelectronics
2011/9/9
Some possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materia...
Application of elastic mid-IR light scattering for inspection of internal gettering operations
mid-IR light scattering gettering
2011/9/9
A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in
CZ Si crystals. A classification of sca...