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3D heterostructures and systems for novel MEMS/NEMS
micro-electro-mechanical systems (MEMS) nano-electro-mechanical systems (NEMS) MEMS/NEMS heterostructures
2010/1/19
In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We prov...