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Application of CW Laser Crystallization for Display Devices
Poly-Si Thin film transistor Glass
2009/6/9
High-performance poly-Si TFTs were created using the diode pumped solid-state (DPSS) continuous-wave (CW) laser lateral crystallization (CLC) method through fabrication processes at no higher than 450...
Excimer laser based crystallization has become a workhorse in preparing poly-Si films for the manufacture of back plates for active matrix liquid crystal displays. Alternative laser techniques applyin...