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High-Quality Poly-Si Crystallization Technology Based on Laser-Induced Melting and Resolidification Dynamics of Si Thin Films
Poly-Si TFT Laser crystallization Lateral crystal growth
2009/6/9
The liquid-solid interface motion and the temperature history of thin Si films during short pulse (< 30 ns) excimer laser annealing are observed by in-situ diagnostics. Substantial supercooling (> 200...