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Characterizing Vibrating Cantilevers for Liquid Viscosity and Density Sensing
Characterizing Vibrating Cantilevers Liquid Viscosity Density Sensing
2009/9/7
Miniaturized liquid sensors are essential devices in online process or condition monitoring. In case of viscosity and density sensing, microacoustic sensors such as quartz crystal resonators or SAW de...
Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection
Integrated MEMS/NEMS Resonant Cantilevers Ultrasensitive Biological Detection
2009/9/4
The paper reviews the recent researches implemented in Chinese Academy of Sciences, with achievements on integrated resonant microcantilever sensors. In the resonant cantilevers, the self-sensing elem...