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Dynamic Analysis on Particle Concentration Induced by Opening the Door of a Front Opening Unified Pod (FOUP) that Loaded with 25 Pieces of 300 mm Wafer Manufacturing Processes
FOUP Minienvironment Clean room Semiconductor processes
2016/3/29
This study investigates experimentally and numerically the influences of FOUP door opening
speed (Vdoor) and the pressure difference (dP) on the dynamic distributions of the averaged nondimensional
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